Statistics
Publications
1
Citations
180
H-Index
1
Active since
1981
Affiliations
Palo Alto Research Center(Current)
D. K. Bieglesen is an author at Palo Alto Research Center specializing in defect density, thin films, and semiconductor defects.
Publications per year
1981–1981
1
1
Effects of inert gas dilution of silane on plasma-deposited <i>a</i>-Si:H films
J. C. Knights, R. Lujan, Martin Rosenblum et al. · Applied Physics Letters · 1981 · 180 citations
1–1 of 1