Concepedia
1
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69
Citations
H-Index
2013
Active since
Affiliations
Infineon Technologies (Germany)(Current)
Reiner Engel is an author at Infineon Technologies (Germany).
Publications per year
2013–2013
Regression Methods for Virtual Metrology of Layer Thickness in Chemical Vapor Deposition
H.‐G. Purwins, Bernd Barak, Ahmed Nagi et al. · IEEE/ASME Transactions on Mechatronics · 2013 · 69 citations · Full text
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