Concepedia
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Publications
1
Citations
15
H-Index
Active since
2022
Affiliations
Nanya Technology (Taiwan)(Current)
Shu-Rong Lu is an author at Nanya Technology (Taiwan).
Publications per year
2022–2022
Predicting the Wafer Material Removal Rate for Semiconductor Chemical Mechanical Polishing Using a Fusion Network
Chien‐Liang Liu, Chun-Jan Tseng, Wen-Hoar Hsaio et al. · Applied Sciences · 2022 · 15 citations · Full text
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