Concepedia

R. Gopalakrishan

RG

Statistics

Publications

2

Citations

33

H-Index

2

Active since

2005

Affiliations

Institute of Microelectronics(Current)

Nanyang Technological University

R. Gopalakrishan is an author at Institute of Microelectronics specializing in surface oxidation, etching processes, and materials engineering.

Publications per year

2005–2005

2

Publications

2

CHF3–O2 reactive ion etching of 4H-SiC and the role of oxygen

Jianping Xia, Rusli Rusli, S.F. Choy et al. · Microelectronic Engineering · 2005 · 23 citations

, , +9

The role of oxygen in electron cyclotron resonance etching of silicon carbide

Jianping Xia, Rusli Rusli, S.F. Choy et al. · Microelectronic Engineering · 2005 · 10 citations

, , +14

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