Concepedia

Christoph Schiffers

CS

Statistics

Publications

2

Citations

184

H-Index

2

Active since

2012

Affiliations

University of Illinois Urbana-Champaign(Current)

CemeCon (Germany)

Linköping University

Christoph Schiffers is an author at University of Illinois Urbana-Champaign specializing in thin films, applied physics, and surface science.

Top concepts

Thin FilmsEngineeringMicrostructureApplied PhysicsSurface ScienceMaterial SciencePhysicsNanotechnologyNanoengineeringCrystalline Defects

Publications per year

2012–2014

2

Publications

2

Metal versus rare-gas ion irradiation during Ti1−<i>x</i>Al<i>x</i>N film growth by hybrid high power pulsed magnetron/dc magnetron co-sputtering using synchronized pulsed substrate bias

Grzegorz Greczyński, Jun Lu, Jens Jensen et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2012 · 119 citations · Full text

Engineering, Thin Film Process Technology, Ion Implantation +20

Novel strategy for low-temperature, high-rate growth of dense, hard, and stress-free refractory ceramic thin films

Grzegorz Greczyński, Jun Lu, S. Bolz et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2014 · 65 citations · Full text

Dcms Mode, Engineering, Dcms Tin Films +18

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